[13p-PB1-1~29] 15.4 III-V-group nitride crystals

▲ [13p-PB1-10] Investigation of GaN regrowth on InGaN/GaN Nanodisks Fabricated by Neutral Beam Etching

〇Kexiong Zhang¹, T. Takahashi¹, D. Ohori², N. Kumagai¹, G. W. Cong¹, K. Endo¹, M. Shimizu^1,3, S. Samukawa², X. L. Wang^1,3 (1.AIST, 2.Tohoku Univ., 3.Nagoya Univ.)

Keywords:InGaN/GaN Nanodisk, Neutral Beam Etching