The 67th JSAP Spring Meeting 2020

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13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[14a-A202-1~8] 13.2 Exploratory Materials, Physical Properties, Devices

Sat. Mar 14, 2020 9:00 AM - 11:00 AM A202 (6-202)

Kosuke Hara(Univ. of Yamanashi)

10:45 AM - 11:00 AM

[14a-A202-8] Growth and characterization of BaSi2 films sputtered on conductive films

〇Ryota Koitabashi1, Taira Nemoto1, Masami Mesuda2, Hideto Kuramochi2, Kaoru Toko1, Takashi Suemasu1 (1.Univ. Tsukuba, 2.Tosoh Corp.)

Keywords:semiconductor, sputtering