[14a-A405-1~7] 22.1 Joint Session M "Phonon Engineering"

△ [14a-A405-7] Evaluation of thermal conductivity of amorphous SiN against phononic crystal nano-structure size

〇Naoki Tambo¹, Yuxuan Liao², Chun Zhou³, Elizabeth Ashley³, Kouhei Takahashi¹, Yasuyuki Naito¹, Junichiro Shiomi², Paul Nealey³ (1.Panasonic, 2.The Univ. of Tokyo, 3.The Univ. of Chicago)

Keywords:amorphous, phononic, thermal conductivity

Unified understanding against heat propagating mechanism for amorphous solids has not been established and the effect of nano-structuring on thermal conductivity is also unknown. Here, we evaluate the thermal conductivity of amorphous SiN against fabricated phononic crystal nano-structure pattern size to inspect the heat propagating characteristics and their controllability. We observed 90% decrease of thermal conductivity due to nano-structure patterning and the size dependence was explained from the model assuming the surface boundary scattering of non-localized atom vibrations in amorphous solids.