[14a-A407-1~8] 16.1 基礎物性・評価・プロセス・デバイス

▲ [14a-A407-4] Physical properties of amorphous Selenium superlattice structures

〇(D)Joshua John¹、Kunitaka Enomoto¹、Noritoshi Miyachi¹、Tomoaki Masuzawa²、Takatoshi Yamada³、Shun Okano⁴、Ken Okano¹ (1.ICU Univ、2.Shizuoka Univ、3.AIST、4.Chemnitz Univ)

キーワード：superlattice, amorphous materials

We have been investigating the fabrication and characterization of superlattices of amorphous materials Se and As₂Se₃ fabricated using rotational evaporation. The multi-nanolayer structure produced from this fabrication method has been confirmed using TOF-SIMS. We used UPS, DLTS, spectroscopic ellipsometry and I-V measurements to study the energy band structure, optical characteristics and transport characteristics of the superlattice structure. From these measurements, we observed typical superlattice features such as oscillation in the IV characteristics with regions of negative differential resistance.