[14a-B407-1~10] 11.4 Analog applications and their related technologies

[14a-B407-4] Improvement of Detection Efficiency of Superconducting Transition Edge Sensors Array

〇(P)Toshio Konno¹, Sachiko Takasu¹, Kaori Hattori¹, Daiji Fukuda^1,2 (1.AIST, 2.OPERANDO-OIL)

Keywords:Transition edge sensors (TES), Superconducting, Thin film

Transition edge sensors (TES) exhibiting high energy resolution of a single optical photon as energy-dispersive detectors have been applied to photon-counting microscopy for biological imaging. Our aim is to develop TES arrays with large effective areas to expand the field of view of photon-counting microscopy and to achieve optical cavity structures with high optical absorption in visible and near-infrared light range for high detection efficiency. We will report the result of measurement using TES arrays with optical cavity structures.