9:30 AM - 9:45 AM
[14a-B410-1] Development of AlGaN-based ultra-high UV(260nm)/VIS rejection photodetector
Keywords:deep ultraviolet, photo-detector, AlGaN
Schottky photodiodes were fabricated from multilayer AlGaN wafer. The device showed maximum responsivity at the wavelength of 260 nm. The responsivity at 630 nm which is visible light is compared with the maximum responsivity as wavelength selection ratio. The result achieves 3.4×105.