[14a-B415-1~9] 3.11 Photonic structures and phenomena

[14a-B415-2] FEM-based automated nanocavity optimization applied for L3 nanocavity

〇Eiichi Kuramochi^1,2, Shota Kita^1,2, Akihiko Shinya^1,2, Masaya Notomi^1,2 (1.NTT-NPC, 2.NTT-BRL)

Keywords:photonic crystal, optical nanocavity, optoelectronic device

We developed an automated nanocavity optimization code based on FEM simulation of the cavity mode. In this study, the code optimized L3 nanocavity by the tuning of the position of 20 holes. After only ~100 nanocavity generation, the code optimized the L3 cavity to be having a Q factor exceeding 2x10⁷. The optimized cavity exhibited an experimental Q factor exceeding 10⁶.