[14a-D305-1~10] 7.5 Ion beams

[14a-D305-4] Size Distributions of Vacuum Electrospray Droplet Ion Beams

〇Satoshi Ninomiya¹, Mikihiro Kawase¹, Lee Chuin Chen¹, Kenzo Hiraoka² (1.Univ. of Yamanashi, 2.Univ. of Yamanashi, CERC)

Keywords:secondary ion mass spectrometry, electrospray, charged droplet

We have studied charged droplets produced by electrospray of aqueous solutions as a massive cluster beam for secondary ion mass spectrometry (SIMS) to much improve the ionization efficiencies. In the previous studies, the prototype of a vacuum electrospray droplet ion (V-EDI) gun was installed in a semi-commercial time-of-flight SIMS system, and the secondary ion yields produced by the V-EDI beams were measured for several organic compounds. In this study, the size distributions of the V-EDI beams and sputtered volumes produced by the beams will be evaluated by the impact marks measured by a scanning probe microscope.