[14a-PB4-1~15] 3.7 Laser processing

[14a-PB4-11] A micro patterning method of Al thin film on polycarbonate by F₂ laser irradiation

〇Tsuyoshi Yoshida¹, Hidetoshi Nojiri², Masayuki Okoshi¹ (1.NDA, 2.RENIAS)

Keywords:VUV laser, micro patterning

In recent years, polycarbonate (=PC) is gathering attention as light and strong material for smart windows. In the presentation, a micropatterning method of Al thin film on silicone hard-coated polycarbonate by 157 nm F₂ laser irradiation will be reported. A 10 micro meter mesh patterned photo-mask was placed on Al thin film on polycarbonate and irradiated by F₂ laser. Then, the non laser irradiated area was removed by KOH aq etching. At the conference, the possibility of the micro pattering method will be reported with the patterning mechanism of the method.