[14a-PB4-1~15] 3.7 Laser processing

[14a-PB4-12] Material Dependence of Laser Microfabrication by Using Tightly Focused Radially Polarized Beams

Masaki Sato¹, 〇Yuichi Kozawa¹, Shunichi Sato¹ (1.IMRAM, Tohoku Univ.)

Keywords:Laser microfabrication, Radial polarization, Longitudinal electric field

Our research aims to apply a radially polarized beam, characterized by the small focal spot formation, to laser micro-fabrication in order to improve the processing scale and the accuracy. We have previously examined single-shot laser ablation for a Cu surface using a tightly focused radially polarized beam, resulting in an ablation crater that reflects the intensity distribution of a focal spot. In this report, we further investigate single-short laser ablation by a radially polarized beam for various metal surfaces and discuss its material dependence.