The 67th JSAP Spring Meeting 2020

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[14p-A302-1~18] 15.4 III-V-group nitride crystals

Sat. Mar 14, 2020 1:45 PM - 6:45 PM A302 (6-302)

Makoto Saito(Tohoku Univ.), Hisashi Murakami(TUAT), Shugo Nitta(Nagoya Univ.)

5:45 PM - 6:00 PM

△ [14p-A302-15] Thermal oxidation of AlInN by mist particle supply

〇(B)Hiroki Matsumoto1, Sho Iwayama1, Norikatsu Koide1, Mahito Odawara1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Motoaki Iwaya1, Takahiro Maruyama1, Isamu Akasaki1,2 (1.Meijo Univ., 2.Akasaki Research Center, Nagoya Univ.)

Keywords:semiconductor, AlInN, oxidation