The 67th JSAP Spring Meeting 2020

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Code-sharing Session » 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

[14p-A303-1~14] 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A303 (6-303)

Norifumi Fujimura(Osaka Pref. Univ.), Eisuke Tokumitsu(JAIST)

2:45 PM - 3:00 PM

△ [14p-A303-5] Preparation of HfO2-based ferroelectric thick film by the sputtering method at room temperature and its electrical properties

〇(PC)Reijiro Shimura1, Takanori Mimura1, Akinori Tateyama1, Takao Shimizu1, Hiroshi Funakubo1 (1.Tokyo Tech. SMCT)

Keywords:ferroelectric film, HfO2