Abnormal ferroelectric phase formation mechanism of ZrO<sub>2</sub> thin film by wet annealing

Presentation information

Oral presentation

Code-sharing Session » 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A303 (6-303)

3:45 PM - 4:00 PM

〇Shigehisa Shibayama¹, Jotaro Nagano², Mitsuo Sakashita¹, Osamu Nakatsuka^1,3 (1.Nagoya Univ., 2.Sch. of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)

Keywords:ZrO2, ferroelectric, wet annealing