The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

17 Nanocarbon Technology » 17.2 Graphene

[14p-A404-1~9] 17.2 Graphene

Sat. Mar 14, 2020 1:45 PM - 4:15 PM A404 (6-404)

Masaki Nakano(Univ. of Tokyo)

1:45 PM - 2:15 PM

[14p-A404-1] [The 4th Thin Film and Surface Physics Division Award Speech] Lock-in thermography for fast and precise electrical characterization technique of large area graphene sheet

Hideaki Nakajima1, Takahiro Morimoto1, Yuki Okigawa1, Yoshiue Ikuta1, Takatoshi Yamada1, Kenji Kawahara2, Hiroki Ago2, Toshiya Okazaki1 (1.AIST, 2.GIC Kyushu Univ.)

Keywords:graphene, defect detection, Lock-in thermography

Large area graphene synthesis by chemical vapor deposition (CVD) method has rapidly progressed for realizing scalable device applications. Nevertheless, the existence of local defects seriously degrades its electrical transport properties. Although several experiments based on scanning tunneling microscopy have shown the influence of defects, only the limited area were investigated in those methods due to long measurement times. Recently, we have developed a novel measurement technique “lock-in thermography” (LIT) enabling fast and precise imaging of electrical characterization for large area carbon materials. Here, we demonstrate the visualization of local defects affecting electrical transport properties of large area CVD graphene films by LIT technique.