Evaluation of Thermal Properties for Nanostructures in Polycrystalline Silicon Grains by Raman Spectroscopy (Ⅱ)

Haruki Takeuchi; Ryo Yokogawa; Kazuya Takahashi; Katsuhiko Komori; Tamotsu Morimoto; Naomi Sawamoto; Atsushi Ogura

Presentation information

Oral presentation

Joint Session M "Phonon Engineering" » 22.1 Joint Session M "Phonon Engineering"

[14p-A405-1~15] 22.1 Joint Session M "Phonon Engineering"

Sat. Mar 14, 2020 1:15 PM - 5:30 PM A405 (6-405)

Yoshiaki Nakamura(Osaka Univ.), Junichiro Shiomi(Univ. of Tokyo), Takashi Yagi(AIST)

1:30 PM - 1:45 PM

△ [14p-A405-2] Evaluation of Thermal Properties for Nanostructures in Polycrystalline Silicon Grains by Raman Spectroscopy (Ⅱ)

〇Haruki Takeuchi¹, Ryo Yokogawa^1,2, Kazuya Takahashi³, Katsuhiko Komori³, Tamotsu Morimoto⁴, Naomi Sawamoto¹, Atsushi Ogura^1,5 (1.Meiji Univ., 2.JSPS Research Fellow DC., 3.Tokyo Electron Technology Solutions Ltd., 4.Tokyo Electron Ltd., 5.Meiji Renewable Energy Laboratory)

Keywords:Nanostructure, poly-Si, Raman Spectroscopy