[14p-D519-1~9] 6.5 Surface Physics, Vacuum

[14p-D519-4] Slant Illumination Dark Field Microscopy Study of Nano-particles

〇Tomoo Sigehuzi¹, Haruhisa Kato¹, Takashi Tokizaki¹ (1.AIST)

Keywords:nano-particles, optical microscopy, scanning probe microscopy

When observing nano-particles on a substrate with microscopy, you should select appropriate fields of view, where particle density is sufficiently high but aggregations are rare. High resolution microscopy such as SEM or SPM is not good at that task because of its small view. We propose a new sample estimation method using optical microscopy.