The 67th JSAP Spring Meeting 2020

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

[14p-D519-1~9] 6.5 Surface Physics, Vacuum

Sat. Mar 14, 2020 1:30 PM - 4:00 PM D519 (11-519)

Azusa Hattori(Osaka Univ.)

2:15 PM - 2:30 PM

[14p-D519-4] Slant Illumination Dark Field Microscopy Study of Nano-particles

Tomoo Sigehuzi1, Haruhisa Kato1, Takashi Tokizaki1 (1.AIST)

Keywords:nano-particles, optical microscopy, scanning probe microscopy

When observing nano-particles on a substrate with microscopy, you should select appropriate fields of view, where particle density is sufficiently high but aggregations are rare. High resolution microscopy such as SEM or SPM is not good at that task because of its small view. We propose a new sample estimation method using optical microscopy.

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