[14p-PA1-1~74] 10 スピントロニクス・マグネティクス

▲ [14p-PA1-9] Hydrogen annealing effect on L1₀ ordering of CoPt thin films

〇Ryo Toyama¹、Shiro Kawachi^1,2、Jun-ichi Yamaura^1,2、Youichi Murakami^1,2、Hideo Hosono¹、Yutaka Majima¹ (1.Laboratory for Materials and Structures, Tokyo Institute of Technology、2.IMSS-KEK)

キーワード：CoPt, L10 ordering, hydrogen annealing

We study the effect of hydrogen annealing of RTA on L1₀ ordering of CoPt. We fabricate Co/Pt multilayer thin films on Si/SiO₂ substrates by electron-beam evaporation. These films are subsequently annealed by RTA under a vacuum or an Ar/H₂ atmosphere. Their crystal structures are characterized by grazing incidence X-ray diffraction (GI-XRD) using synchrotron radiation at KEK (BL-8B).