12:15 PM - 12:30 PM
[15a-A305-13] Study of GeO2/Ge structure formed after Hf deposition
Keywords:semiconductor, Ge
Presentation information
Oral presentation
13 Semiconductors » 13.3 Insulator technology
[15a-A305-1~13] 13.3 Insulator technology
Sun. Mar 15, 2020 9:00 AM - 12:30 PM A305 (6-305)
Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo)