9:15 AM - 9:30 AM
[15a-A305-2] Electric propertes of anodic SiO2 film oxidized in high-pressure steam
Keywords:anodic oxidation, high-pressure steam, SiO2 films
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Sun. Mar 15, 2020 9:00 AM - 12:30 PM A305 (6-305)
Takanobu Watanabe(Waseda Univ.), Koji Kita(Univ. of Tokyo)
9:15 AM - 9:30 AM
Keywords:anodic oxidation, high-pressure steam, SiO2 films