[15a-A408-1~9] 12.3 Functional Materials and Novel Devices

[15a-A408-7] Nanogap Electrodes-based Resistive Oxygen Sensor using Cerium Oxide thin film by Sol-gel method

〇Tsubasa Tosa¹, Phan Trong Tue¹, Yutaka Majima¹ (1.Tokyo Tech)

Keywords:Oxygen sensor, Nanogap electrodes, Sol-gel ceria

We fabricated nanogap electrodes-based resistive oxygen sensor using cerium oxide thin film by sol-gel method, and measured its response speed.