[15a-D215-1~12] 7.2 Applications and technologies of electron beams

[15a-D215-4] Specimen quality labeling for nanoparticle size distribution measurements by electron microscope

〇Akira Kurokawa¹, Kazuhiro Kumagai¹ (1.AIST)

Keywords:nanoparticle size distribution, measurements by electron microscope, specimen preparation

Towards the precise measurement of the nanoparticle size distribution, the specimen preparations by dropping & drying nanoparticle suspension are typically used. We would propose 2-step evaluation method of the specimen quality, in which the second step is the identification of the ring-shaped agglomeration. When we searched for the best condition of the specimen fabrication, fluorescent nanoparticle observation with optical microscopes could be used with the first step criteria.