[15a-D419-1~12] 6.1 Ferroelectric thin films

△ [15a-D419-4] Evaluation of crystal structures and piezoelectric properties of epitaxial Pb(Zr,Ti)O₃ thin films grown on Si substrates

〇Geng Tan¹, Eun-Ji Kim², Sang-Hyo Kweon¹, Tomoyuki Koganezawa³, Isaku Kanno¹ (1.Kobe Univ., 2.Korea Univ., 3.JASRI)

Keywords:epitaxial piezoelectric thin film, in situ XRD observation, evaluation of piezoelectric properties

Pb(Zr,Ti)O₃ (PZT) thin films have been used as various devices due to their high piezoelectric properties. In order to improve the piezoelectric properties of PZT thin films, it is essential to understand the correlation between crystal structures and piezoelectric properties. In this study, we fabricated epitaxial PZT thin films on Si substrates with buffered layers and investigated their crystal structures and piezoelectric properties. We also measured the synchrotron X-ray diffraction (XRD) of PZT thin films under applied DC voltages to investigate in situ crystal deformation, and compared with the macroscopic piezoelectric properties from converse and direct piezoelectric effects.