[15a-PA5-1~25] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15a-PA5-15] Mechanical alloying on Ga₂O₃ and Al₂O₃ mixture powders

〇Hiroaki Kishimura¹ (1.NDA)

Keywords:Gallium oxide, Mechanical Alloying

Mechanical alloying on Ga₂O₃ and Al₂O₃ mixture was conducted using a vibrational milling apparatus with a stainless vessel and zirconia balls. The mixed powders were characterized by X-ray diffraction analysis and Raman spectroscopy. With an increase alloying time, the Bragg peaks originated from Ga₂O₃ and Al₂O₃ were broaden. However, the Bragg peaks derived from (GaAl)₂O₃ compound were not observed.