2020年第67回応用物理学会春季学術講演会

講演情報

一般セッション(ポスター講演)

6 薄膜・表面 » 6.4 薄膜新材料

[15a-PB1-1~20] 6.4 薄膜新材料

2020年3月15日(日) 09:30 〜 11:30 PB1 (第1体育館)

09:30 〜 11:30

[15a-PB1-7] Effect of MoS2(00l)/MoO2(0kl), (h00) crystal plane orientation of horizontal and vertical sheets on thermoelectric properties of MoS2/MoO2 hierarchical thin film

〇(D)Abinaya Rengarajan1,2、Harish Santhanakrishnan1,2、Archana Jayaram2、Navaneethan Mani2、Hayakawa Yasuhiro1,2、Shimomura Masaru1 (1.Shizuoka university、2.SRM IST)

キーワード:Thermoelectricity, nanosheets, MoS2/MoO2

We report thermoelectric properties of chemical vapor deposition (CVD) based growth of 2D MoS2 nanostructures and its thermoelectric behavior. XRD pattern confirms the formation of MoS2/MoO2 hierarchical thin film with crystal plane orientations MoS2 (00l) and MoO2 (0kl) and (h00). The Hall measurement suggest that fabricated film is p-type carrier concentration and the carrier concentration is on the order of 1016 cm-3 with carrier mobility of 11.7 cm2V-1s-1. Vertical growth of MoS2 is achieved by large supersaturation of S: MoO3 ratio using large growth time of 30 min. Mechanistic understanding of MoS2 growth and alignment has been developed with the aid of FESEM observation. The gradual growth of vertical nanosheets, evoluted from horizontal nanosheets is noticed. The sheet thickness is increased by overgrowth of MoS2 on vertical nanosheets and very smooth surfaced nanosheets also observed. But anchoring of MoO2 particles over MoS2 nanosheets along with step-like layered nanosheets has been obtained. The possible mechanism is shown and anchoring of MoO2 particles on MoS2 sheets are demonstrated.