[15a-PB2-1~22] 8 プラズマエレクトロニクス

▲ [15a-PB2-12] Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate

〇(M2C)ManhHung Chu¹、Haruka Suzuki¹、Hirotaka Toyoda¹ (1.Nagoya Univ.)

キーワード：atmospherica pressure plasma, plasma heat flux

Atmospheric pressure (AP) microwave plasma generated in waveguide slots is attracting increasing attention thanks to the appeal of low gas temperature and high plasma density. Previously, our group has successfully produced a meter-scale AP microwave plasma source utilizing travelling wave and has reported the existence of energy flow within the waveguide slot along the z-direction. In this study, we further investigate energy flow of the slot-type AP microwave plasma, by analyzing the temperature rise-up of the slot-plate due to the heat flux from the plasma. In addition, the result is discussed by a simple analytical model.