[15a-PB2-1~22] 8 Plasma Electronics

[15a-PB2-15] Spatiotemporal optical emission spectroscopy to estimate electron densities and temperatures of a plasma in solution

〇(D)Kenichi Inoue^1,2, Shion Takahashi¹, Noritaka Sakakibara^1,2, Susumu Toko¹, Tsuyohito Ito^1,2, Kazuo Terashima^1,2 (1.The Univ. of Tokyo, 2.AIST)

Keywords:plasmas in solution, optical emission spectroscopy, pulse discharge

Electrons of plasmas in solution have an important role in processing to cause radical generation.The diagnostics about electron densities and temparatures of plasmas in solution are required to optimize the processing. In this study, electron density and temperature measurements of plasmas in solution were performed with spatiotemporally resolved optical emission spectroscopy. In particular, the electron temperature distribution was estimated by using continuum emission spectra and a model of an electron-neutral bremsstrahlung.