The 67th JSAP Spring Meeting 2020

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[15p-A201-1~15] 15.6 Group IV Compound Semiconductors (SiC)

Sun. Mar 15, 2020 1:00 PM - 5:00 PM A201 (6-201)

Mitsuru Sometani(AIST), Munetaka Noguchi(Mitsubishi Electric)

2:30 PM - 2:45 PM

△ [15p-A201-7] Universal mobility of electrons in SiC(0001)/SiO2 systems with phosphorus treatment

〇Koji Ito1, Masahiro Horita1,2, Jun Suda1,2, Tsunenobu Kimoto1 (1.Kyoto Univ., 2.Nagoya Univ.)

Keywords:SiC, MOS, MOSFET