2:30 PM - 2:45 PM
△ [15p-A201-7] Universal mobility of electrons in SiC(0001)/SiO2 systems with phosphorus treatment
Keywords:SiC, MOS, MOSFET
Oral presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)
Sun. Mar 15, 2020 1:00 PM - 5:00 PM A201 (6-201)
Mitsuru Sometani(AIST), Munetaka Noguchi(Mitsubishi Electric)
2:30 PM - 2:45 PM
Keywords:SiC, MOS, MOSFET