[15p-B410-1~11] 3.13 Semiconductor optical devices

[15p-B410-2] Evaluation of heat dissipation of quantum cascade laser by simulations and structure functions

〇Shigeyuki Takagi¹, Hirotaka Tanimura¹, Tsutomu Kakuno², Rei Hashimoto², Kei Kaneko², Shinji Saito² (1.Tokyo Univ. of Tech., 2.Toshiba)

Keywords:quantum cascade laser, thermal resistance, structure function

Quantum cascade lasers (QCLs) are semiconductor lasers that oscillate in the mid/far infrared region. Higher output is required for application to concentration measurement of trace gas. To improve the heat dissipation of QCL for higher output, we developed a method to calculate the thermal resistance of each part of QCL from the structural function measured by Static method. In the QCL ridge structure, four types of thermal resistance were measured: insulating film cover, metal buried, and buried InP with epi-side down. It was shown that the thermal resistance of the InP buried type was minimized.