[15p-B415-1~11] 【CS.2】 Code-sharing Session of 3.11 & 3.12

△ [15p-B415-2] Verification of spectroscopic principle using plasmonic photodetector with angle variable MEMS

〇Masaaki Oshita¹, Hidetoshi Takahashi², Tetsuo Kan¹ (1.The University of Electro-Communications, 2.Keio University)

Keywords:MEMS, Plasmonics, Schottky barrier

Here, we verified a condition for a plasmonic photodetector formed on the n-Si cantilever to apply it for miniaturization of the spectrometer. This photodetector detects a corresponding wavelength depending on the incident angle by surface plasmon resonance and barrier between Au and n-Si, and its property allows to performs spectroscopy. A condition for spectroscopy using this photodetector is that the sum of the currents obtained by inputting monochromatic light is equivalent to the current obtained by simultaneously inputting them. In this study, we confirmed that the photodetector satisfies this condition.