Optimization and Experimental Demonstration of Compact and High-Sensitive Multi-Slotted Bragg grating Waveguide Sensor on SOI Platform

Siim Heinsalu; Yuji Isogai; Hiroshi Ishikawa; Yuichi Matsushima; Katsuyuki Utaka

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一般セッション(口頭講演)

3 光・フォトニクス » 3.16 Optics and Photonics English Session

[15p-B508-1~7] 3.16 Optics and Photonics English Session

2020年3月15日(日) 13:15 〜 15:00 B508 (2-508)

西山伸彦(東工大)、宇高勝之(早大)

13:30 〜 13:45

▼ [15p-B508-2] Optimization and Experimental Demonstration of Compact and High-Sensitive Multi-Slotted Bragg grating Waveguide Sensor on SOI Platform

〇(D)Siim Heinsalu¹、Yuji Isogai¹、Hiroshi Ishikawa¹、Yuichi Matsushima¹、Katsuyuki Utaka¹ (1.Waseda University)

キーワード：silicon photonics, sensor, Bragg grating

Bragg grating composed of sub-wavelength grating with multiple slot counts is set as sensor. With 3D simulations we compare parameter dependences and fabricate. Best case had record high sensitivity 831.1 nm/RIU and length 9.48 µm.