[15p-B508-1~7] 3.16 Optics and Photonics English Session

▲ [15p-B508-5] Analysis of Low loss InP-based membrane waveguide for optical interconnection on Si substrate

〇WEIQI WANG¹, Weicheng Fang¹, Koichi Saito¹, Naoki Takahashi¹, Tomohiro Amemiya^1,2, Nobuhiko Nishiyama^1,2 (1.Tokyo Tech, 2.IIR)

Keywords:optical waveguides

Membrane photonic integrated circuits, which consists of thin III-V layer sandwiched by SiO2 or Air, have been proposed to overcome signal delay and large power dissipation in global wiring. It consists of laser, detector and waveguides. Although we tend to pay attention to lasers and detectors, the performance of waveguides is very important to determine the total loss and size of the circuits.InP-based waveguide devices have several advantages, such as large refractive index difference and small device size. It is easy to achieve the integration of active and Passive Components. To achieve low loss and compactness in waveguide, structure dependence of bending and propagation loss are analyzed in this report.