[15p-D305-1~13] 1.6 Ultrasonics

[15p-D305-2] Resonance properties of leaky SAW harmonics on bonded dissimilar material structures

〇Shiori Asakawa¹, Masashi Suzuki¹, Syoji Kakio¹, Ami Tezuka², Jun Mizuno² (1.Univ. of Yamanashi, 2.Waseda University)

Keywords:surface acoustic wave, leaky surface acoustic wave, harmonics

The high-performance surface acoustic wave (SAW) devices with a high frequency and a large Q factor are required. As an approach to higher frequency, the measures by using SAW harmonics excited by IDTs was recognized. In this report, the resonance characteristics of leaky SAW (LSAW) third harmonics on a structure in which LiTaO₃ (LT) and Quartz were bonded were reported. As a result of the experiment, the bandwidth of the third harmonics were increased from 0.8% to 1.6% by bonding with quartz. In the future, the measures to excite harmonics more strongly will be searched.