Heeyeop Chae

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Speaker, Author, Co-Author

Sun. Sep 12, 2021 3:30 PM - 5:30 PM N204 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.6 Plasma Electronics English Session

[12p-N204-8~11] 8.6 Plasma Electronics English Session

4:45 PM - 5:30 PM

▲ [12p-N204-11] [INVITED] Atomic Layer Etching Processes for Dielectric and Metals

〇Heeyeop Chae^1,2, Yongjae Kim¹ (1.SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University (SKKU), 2.School of Chemical Engineering, Sungkyunkwan University (SKKU))

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