Kazuo Nojiri

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:30 PM - 4:55 PM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11p-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

3:15 PM - 3:45 PM

[11p-S301-4] Moving from reactive ion etching to atomic layer etching

〇Kazuo Nojiri¹ (1.Nanotech Research)