Masanobu Honda

→ Search for Masanobu Honda in Google Scholar

Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:30 PM - 4:55 PM S301 (Oral)

Symposium (Oral)
| Symposium
| Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

[11p-S301-1~7] Atomic layer processes for future device fabrication; Understanding surface reaction dynamics and its control

3:45 PM - 4:15 PM

[11p-S301-5] Development of state-of-the-art atomic-level process and future outlook

〇Masanobu Honda¹, Takayuki Katsunuma¹, Sho Kumakura¹, Yoshihide Kihara¹ (1.Tokyo Electron Miyagi)