Toko Tsuchida

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 4:15 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[10p-N304-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:30 PM - 1:45 PM

[10p-N304-1] Effect of Pinholes at Side Walls on Water Flow of Batch-Type Silicon Wafer Wet Cleaning Bath

Takahashi Toshihiko¹, 〇Toko Tsuchida¹, Habuka Hitoshi¹, Goto Akihiro² (1.Yokohama National Univ., 2.Pre-Tech)