Yuya Yamashita

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 9:00 AM - 11:30 AM S301 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[10a-S301-1~10] 8.1 Plasma production and diagnostics

9:15 AM - 9:30 AM

△ [10a-S301-2] Electron temperature, density, and energy distribution function diagnostics of the argon low pressure argon plasma generated by an etching unit based on optical emission spectroscopic measurement

〇Yuya Yamashita¹, Takuya Akiba¹, Toshihide Iwanaga¹, Shuichi Date¹, Yamaoka Hidehiko¹, Hiroshi Akatsuka² (1.TIRI, 2.Tokyo Tech)