Shuntarou Waki

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:15 PM N307 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[10p-N307-1~14] 7.1 X-ray technologies

3:00 PM - 3:15 PM

[10p-N307-7] High irradiance illuminator for transmission extreme ultraviolet microscopy

〇(M2)Shuntarou Waki¹, Tsukui Yusuke¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)