14:15 〜 14:30 ▲ [10p-N202-4] Dopant Redistribution in High Temperature Grown Sb-doped Ge Epitaxial Films 〇Rahmat Hadi Saputro1,2、Ryo Matsumura1、Naoki Fukata1,2 (1.NIMS、2.Univ. of Tsukuba)