Koya Yasuda

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 2:00 PM - 4:30 PM S301 (Oral)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[10p-S301-3~12] 8.1 Plasma production and diagnostics

3:15 PM - 3:30 PM

[10p-S301-8] Development of magnetron sputtering device with rotational magnets for effective target-utilization

〇Koya Yasuda¹ (1.Saga Univ.)