Yusuke Tsukui

→ Search for Yusuke Tsukui in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:30 PM - 5:15 PM N307 (Oral)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[10p-N307-1~14] 7.1 X-ray technologies

2:45 PM - 3:00 PM

[10p-N307-6] Interferometric Wavefront Measurement on Three-Mirror Objective for EUV Microscopy

〇(M1)Yusuke Tsukui¹, Shuntaro Waki¹, Jun Chen¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)