Takehito Shibuya

→ Search for Takehito Shibuya in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 10, 2021 1:00 PM - 4:15 PM N323 (Oral)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[10p-N323-1~12] 13.3 Insulator technology

1:00 PM - 1:15 PM

[10p-N323-1] Study of deposition temperature dependence of GeO2 films by CVD method

〇Takehito Shibuya¹, Hirotaka Iino¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)