SHOHEI HAYASHI

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Speaker, Author, Co-Author

Thu. Sep 23, 2021 1:00 PM - 2:40 PM P09 (Poster)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[23p-P09-1~2] 15.6 Group IV Compound Semiconductors (SiC)

1:00 PM - 2:40 PM

[23p-P09-2] Origin Analysis of Stacking Fault Complex in 4H-SiC Epitaxial Wafer Using TEM

〇SHOHEI HAYASHI¹, HIDEKI SAKO¹, JUNJI SENZAKI² (1.Toray Research Center, 2.AIST)