Yuga Sato

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Speaker, Author, Co-Author

Mon. Sep 13, 2021 1:00 PM - 5:15 PM S301 (Oral)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-S301-1~15] 6.2 Carbon-based thin films

4:00 PM - 4:15 PM

[13p-S301-11] Fabrication and structural analysis of a-CNx:H thin films with high nitrogen content
by microwave plasma CVD of the acetylene-nitrogen gas mixture

〇(M2)Yuga Sato¹, Haruhiko Ito¹ (1.Nagaoka Univ of Tech.)