Hiromu Igarashi

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Speaker, Author, Co-Author

Fri. Sep 10, 2021 10:30 AM - 12:00 PM N302 (Oral)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-N302-1~6] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:45 AM - 12:00 PM

[10a-N302-6] Research on Capacitive Micro-Displacement Sensors

〇Hiromu Igarashi¹, Fuminobu Imaizumi¹ (1.Onct)