Yubin DENG

→ Search for Yubin DENG in Google Scholar

Speaker, Author, Co-Author

Sun. Sep 12, 2021 1:30 PM - 5:15 PM N304 (Oral)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12p-N304-1~14] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

5:00 PM - 5:15 PM

▲ [12p-N304-14] Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films against Cu diffusion by the time-lag method

〇(D)Yubin DENG¹, Taewoong Kim¹, Momoko Deura¹, Takeshi Momose¹, Akira Matsuo², Nobuo Yamaguchi², Yukihiro Shimogaki¹ (1.The Univ. of Tokyo, 2.CANON ANELVA CORP.)

▲