Yoshihiko Asano

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Speaker, Author, Co-Author

Sat. Sep 11, 2021 1:30 PM - 5:30 PM N323 (Oral)

Oral presentation
| 12 Organic Molecules and Bioelectronics
| 12.2 Characterization and Materials Physics

[11p-N323-1~13] 12.2 Characterization and Materials Physics

5:00 PM - 5:15 PM

[11p-N323-12] Quantitative Measurements of Adhesion Forces and Degree of Swelling at Surfaces of the PVA Brush for Semiconductor Wafer Cleaning by AFM in Liquids.

〇Yoshihiko Asano¹, Takahiko Ikarashi¹, Kazuki Miyata¹, Keisuke Miyazawa¹, Megumi Uno², Chikako Takatoh², Takeshi Fukuma¹ (1.Kanazawa Univ., 2.EBARA Corp.)

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