The 82nd JSAP Autumn Meeting 2021

Presentation information

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[10a-N202-1~10] 15.5 Group IV crystals and alloys

Fri. Sep 10, 2021 9:30 AM - 12:00 PM N202 (Oral)

Kentarou Sawano(Tokyo City Univ.)

11:00 AM - 11:15 AM

[10a-N202-7] Improved Mobility of Interface-Modulated Solid-Phase Crystallization of Sn-Doped Ge / Insulator by adding a-Si cap

Ryutaro Hara1, Masanori Chiyozono1, Kenta Moto2,3, Keisuke Yamamoto2, Taizoh Sadoh1 (1.Kyushu Univ. ISEE, 2.Kyushu Univ. IGSES, 3.JSPS Research Fellow)

Keywords:semiconductor

本研究ではSn添加Ge極薄膜の固相成長に与えるa-Siキャップ効果を検討した。